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          Brooks SLA5853S 質量流量計

          簡要描述:Brooks SLA5853S 質量流量計長期零點穩定性,每年變動小于滿量程的 0.2%;流量范圍寬 - 從0.003一直到 2500 lpm;耐壓等級 - 高達 1500 psi/100 bar(可選:4500 psi/310 bar)

          • 產品型號:
          • 廠商性質:代理商
          • 更新時間:2024-03-12
          • 訪  問  量:1285
          詳情介紹

          性能

          流量范圍-滿量程容量

          .003 - 2500 slpm

          精度

          17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

          ±0.6% of SP (20- FS)

          ±0.12% of FS (<20% FS)

          1100 slpm up to 2500 slpm: ±0.6% of FS

           

          Standard Devices (includes uncertainty from reference standards

          ±0.9% of SP (20- FS)

          ±0.18% of FS (2-20% FS)

          1100 slpm up to 2500 slpm: ±1.0% of FS

          重復性

          0.20% SP

          線性

          Included in accuracy

          響應時間-常閉

          0.003 - 100 slpm: <1 second

          100 - 2500 slpm: <3 seconds

          多氣體多量程

          Standard

          大壓力

          .003-200 slpm: 1500 psi/103 bar

          100 - 2500 slpm: 1000 psi/70 bar

          Optional 4500 psi/310 bar on 50 slpm max device

          控制范圍

          1-50 slpm: 100:1 Turndown for F.S.

          50-2500 lpm: 50:1 Turndown for F.S.

          零點穩定性

          < 0.2% F.S. per year

          溫度系數

          Zero: <0.05% of F.S per oC

          Span: <0.1% of S.P. per oC

          壓力系數

          0.03% per psi (0-200 psi N2)

          靈敏度

          <0.2% F.S. maximum deviation from specified accuracy after re-zeroing

          等級

          大溫度

          65oC

          壓差范圍

          Controllers

          .003 - 50 lpm: 5 psi / 0.35 bar

          50 - 100 lpm: 10 psi / 0.69 bar

          500 lpm: 7.5 psi / 0.52 bar

          1000 lpm: 14.5 psi / 1.00 bar

          2500 lpm: 35.0 psi / 2.41 bar

           

          漏率

          1x10-9 atm cc/sec He

          機械

           

          密封材料

          Elastomer Seal

          接液材料

          316L Stainless Steel

          High Alloy Stainless Steel

          Viton® Fluoroelastomers

          Buna-N

          Kalrez®

          Teflon®/Kalrez®

          EPDM

          閥門

          Normally Closed

           

          Normally Open

           

          Meter (no valve)

          診斷

           

          診斷能力

          Available

           

          狀態燈

          MFC Health, Network Status

           

          報警

          Sensor Output

          Control Valve Output

          Over Temperature

          Power Surge/Sag

          Network Interruption

           

          診斷/服務端口

          RS485 via 2.5mm jack

           

          電氣

           

           

          模擬通訊

          0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

          數字通訊

          DeviceNet™
          EtherCAT®
          EtherNet/IP™
          FOUNDATIONTM Fieldbus
          Profibus®
          PROFINET
          RS-485 

          電氣連接

          DeviceNet™: 1xM12 with threaded coupling nut (B)

          EtherCAT®, EtherNet/IP™: 1x5-pin M8 with threaded coupling nut/2xRJ45

          Profibus®: 1x15-pin Male Sub-D/1x9-pin female Sub-D

          RS485: 1 x 15-pin Male Sub-D, (A)

          電源-功耗

          Analog / Profibus® / RS-485

          Valve Orifice > 0.032": 8 Watts

          Valve Orifice ≤ 0.032": 5 Watts

          Without Valve: 2 Watts

          DeviceNet™ / EtherNet/IP™

          Valve Orifice > 0.032": 10 Watts

           

          Valve Orifice ≤ 0.032":  7 Watts

           

          Without Valve: 4 Watts (DeviceNet™), 3 Watts (EtherNet/IP™)

          EtherCAT®

          Valve Orifice > 0.032": 8.5 Watts

           

          Valve Orifice ≤ 0.032": 5.5 Watts

           

          Without Valve: 2.5 Watts

          承諾

          認證和批準

          ISO/IEC 17025:2005
          CE: EMC Directive 2014/30/EU
          Directive 2011/65/EU

          UL (Recognized):
          Class I, Div 2, Group A, B, C, D
          Class I, Zone 2, IIC T4
          Class II, Zone 22

          ATEX: II 3 G Ex nA IIC T4 Gc

          IECEx: II 3 G Ex nA IIC T4 Gc

          KOSHA: Ex nA IIC T4

           

          符合環保要求

          RoHS Directive (2011/65/EU)

          REACH Directive EC 1907/2006

          大小

          Medium



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