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    產品展示 / products 您的位置:網站首頁 > 產品展示 > 氣體質量流量計 > Brooks質量流量計 > Brooks SLA5853S 質量流量計

    Brooks SLA5853S 質量流量計

    簡要描述:Brooks SLA5853S 質量流量計長期零點穩定性,每年變動小于滿量程的 0.2%;流量范圍寬 - 從0.003一直到 2500 lpm;耐壓等級 - 高達 1500 psi/100 bar(可選:4500 psi/310 bar)

    • 產品型號:
    • 廠商性質:代理商
    • 更新時間:2021-03-08
    • 訪  問  量:847
    詳情介紹

    性能

    流量范圍-滿量程容量

    .003 - 2500 slpm

    精度

    17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

    ±0.6% of SP (20- FS)

    ±0.12% of FS (<20% FS)

    1100 slpm up to 2500 slpm: ±0.6% of FS

     

    Standard Devices (includes uncertainty from reference standards

    ±0.9% of SP (20- FS)

    ±0.18% of FS (2-20% FS)

    1100 slpm up to 2500 slpm: ±1.0% of FS

    重復性

    0.20% SP

    線性

    Included in accuracy

    響應時間-常閉

    0.003 - 100 slpm: <1 second

    100 - 2500 slpm: <3 seconds

    多氣體多量程

    Standard

    大壓力

    .003-200 slpm: 1500 psi/103 bar

    100 - 2500 slpm: 1000 psi/70 bar

    Optional 4500 psi/310 bar on 50 slpm max device

    控制范圍

    1-50 slpm: 100:1 Turndown for F.S.

    50-2500 lpm: 50:1 Turndown for F.S.

    零點穩定性

    < 0.2% F.S. per year

    溫度系數

    Zero: <0.05% of F.S per oC

    Span: <0.1% of S.P. per oC

    壓力系數

    0.03% per psi (0-200 psi N2)

    靈敏度

    <0.2% F.S. maximum deviation from specified accuracy after re-zeroing

    等級

    大溫度

    65oC

    壓差范圍

    Controllers

    .003 - 50 lpm: 5 psi / 0.35 bar

    50 - 100 lpm: 10 psi / 0.69 bar

    500 lpm: 7.5 psi / 0.52 bar

    1000 lpm: 14.5 psi / 1.00 bar

    2500 lpm: 35.0 psi / 2.41 bar

     

    漏率

    1x10-9 atm cc/sec He

    機械

     

    密封材料

    Elastomer Seal

    接液材料

    316L Stainless Steel

    High Alloy Stainless Steel

    Viton® Fluoroelastomers

    Buna-N

    Kalrez®

    Teflon®/Kalrez®

    EPDM

    閥門

    Normally Closed

     

    Normally Open

     

    Meter (no valve)

    診斷

     

    診斷能力

    Available

     

    狀態燈

    MFC Health, Network Status

     

    報警

    Sensor Output

    Control Valve Output

    Over Temperature

    Power Surge/Sag

    Network Interruption

     

    診斷/服務端口

    RS485 via 2.5mm jack

     

    電氣

     

     

    模擬通訊

    0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

    數字通訊

    DeviceNet™
    EtherCAT®
    EtherNet/IP™
    FOUNDATIONTM Fieldbus
    Profibus®
    PROFINET
    RS-485 

    電氣連接

    DeviceNet™: 1xM12 with threaded coupling nut (B)

    EtherCAT®, EtherNet/IP™: 1x5-pin M8 with threaded coupling nut/2xRJ45

    Profibus®: 1x15-pin Male Sub-D/1x9-pin female Sub-D

    RS485: 1 x 15-pin Male Sub-D, (A)

    電源-功耗

    Analog / Profibus® / RS-485

    Valve Orifice > 0.032": 8 Watts

    Valve Orifice ≤ 0.032": 5 Watts

    Without Valve: 2 Watts

    DeviceNet™ / EtherNet/IP™

    Valve Orifice > 0.032": 10 Watts

     

    Valve Orifice ≤ 0.032":  7 Watts

     

    Without Valve: 4 Watts (DeviceNet™), 3 Watts (EtherNet/IP™)

    EtherCAT®

    Valve Orifice > 0.032": 8.5 Watts

     

    Valve Orifice ≤ 0.032": 5.5 Watts

     

    Without Valve: 2.5 Watts

    承諾

    認證和批準

    ISO/IEC 17025:2005
    CE: EMC Directive 2014/30/EU
    Directive 2011/65/EU

    UL (Recognized):
    Class I, Div 2, Group A, B, C, D
    Class I, Zone 2, IIC T4
    Class II, Zone 22

    ATEX: II 3 G Ex nA IIC T4 Gc

    IECEx: II 3 G Ex nA IIC T4 Gc

    KOSHA: Ex nA IIC T4

     

    符合環保要求

    RoHS Directive (2011/65/EU)

    REACH Directive EC 1907/2006

    大小

    Medium



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